Title: Influence of diluted acid mixtures on selective etching of MHz- A nd kHz-fs-laser inscribed structures in YAG
Authors: Hasse, Kore Yunxin 
Kip, Detlef  
Kränkel, Christian
Language: en
Subject (DDC): DDC::500 Naturwissenschaften und Mathematik
Issue Date: 2021
Publisher: OSA
Document Type: Article
Journal / Series / Working Paper (HSU): Optical materials express 
Volume: 11
Issue: 5
Page Start: 1546
Page End: 1554
Publisher Place: Washington, DC
Abstract: 
We show that the inscription velocity of fs-laser written structures in YAG crystals can be significantly improved by the use of MHz repetition rates for the writing process. Using a 10 MHz inscription laser, record high writing velocities up to 100 mm/s are achieved. Also, the selective etching process is accelerated using a diluted mixture of 22% H3PO4and 24% H2SO4. The diluted mixture enables selective etching of up to 9.6 mm long, 1 μm wide and 18 μm high microchannels in 23 days. The etching parameter D of 11.2 μm2/s is a factor of 3 higher than previously reported and the selectivity is even increased by an order of magnitude. c 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.
Organization Units (connected with the publication): Experimentalphysik und Materialwissenschaften 
URL: https://api.elsevier.com/content/abstract/scopus_id/85105525604
ISSN: 2159-3930
DOI: 10.1364/OME.423931
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