Title: Influence of diluted acid mixtures on selective etching of MHz- A nd kHz-fs-laser inscribed structures in YAG
Authors: Hasse, Kore Yunxin 
Kip, Detlef  
Kränkel, Christian
Language: en
Subject (DDC): DDC::500 Naturwissenschaften und Mathematik
Issue Date: 2021
Publisher: OSA
Document Type: Article
Journal / Series / Working Paper (HSU): Optical materials express 
Volume: 11
Issue: 5
Page Start: 1546
Page End: 1554
Publisher Place: Washington, DC
We show that the inscription velocity of fs-laser written structures in YAG crystals can be significantly improved by the use of MHz repetition rates for the writing process. Using a 10 MHz inscription laser, record high writing velocities up to 100 mm/s are achieved. Also, the selective etching process is accelerated using a diluted mixture of 22% H3PO4and 24% H2SO4. The diluted mixture enables selective etching of up to 9.6 mm long, 1 μm wide and 18 μm high microchannels in 23 days. The etching parameter D of 11.2 μm2/s is a factor of 3 higher than previously reported and the selectivity is even increased by an order of magnitude. c 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement.
Organization Units (connected with the publication): Experimentalphysik und Materialwissenschaften 
URL: https://api.elsevier.com/content/abstract/scopus_id/85105525604
ISSN: 2159-3930
DOI: 10.1364/OME.423931
Appears in Collections:Publications of the HSU Researchers

Show full item record

CORE Recommender


checked on May 17, 2022

Google ScholarTM




Items in openHSU are protected by copyright, with all rights reserved, unless otherwise indicated.