| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hasse, Kore Yunxin | - |
| dc.contributor.author | Kip, Detlef | - |
| dc.contributor.author | Kränkel, Christian | - |
| dc.date.accessioned | 2021-12-15T08:28:00Z | - |
| dc.date.available | 2021-12-15T08:28:00Z | - |
| dc.date.issued | 2021 | - |
| dc.identifier.issn | 2159-3930 | - |
| dc.identifier.issn | 2159-3930 | - |
| dc.description.abstract | We show that the inscription velocity of fs-laser written structures in YAG crystals can be significantly improved by the use of MHz repetition rates for the writing process. Using a 10 MHz inscription laser, record high writing velocities up to 100 mm/s are achieved. Also, the selective etching process is accelerated using a diluted mixture of 22% H3PO4and 24% H2SO4. The diluted mixture enables selective etching of up to 9.6 mm long, 1 μm wide and 18 μm high microchannels in 23 days. The etching parameter D of 11.2 μm2/s is a factor of 3 higher than previously reported and the selectivity is even increased by an order of magnitude. c 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. | - |
| dc.description.sponsorship | Experimentalphysik und Materialwissenschaften | - |
| dc.language.iso | eng | - |
| dc.publisher | OSA | - |
| dc.relation.ispartof | Optical materials express | - |
| dc.title | Influence of diluted acid mixtures on selective etching of MHz- A nd kHz-fs-laser inscribed structures in YAG | - |
| dc.type | Article | - |
| dc.identifier.doi | 10.1364/OME.423931 | - |
| dc.identifier.scopus | 2-s2.0-85105525604 | - |
| dcterms.bibliographicCitation.volume | 11 | - |
| dcterms.bibliographicCitation.issue | 5 | - |
| dcterms.bibliographicCitation.pagestart | 1546 | - |
| dcterms.bibliographicCitation.pageend | 1554 | - |
| dcterms.bibliographicCitation.originalpublisherplace | Washington, DC | - |
| local.submission.type | only-metadata | - |
| item.grantfulltext | none | - |
| item.languageiso639-1 | en | - |
| item.fulltext_s | No Fulltext | - |
| item.openairetype | Article | - |
| item.fulltext | No Fulltext | - |
| crisitem.author.dept | Experimentalphysik und Materialwissenschaften | - |
| crisitem.author.dept | Experimentalphysik und Materialwissenschaften | - |
| crisitem.author.orcid | 0000-0001-7923-0113 | - |
| crisitem.author.parentorg | Fakultät für Elektrotechnik | - |
| crisitem.author.parentorg | Fakultät für Elektrotechnik | - |
| Appears in Collections: | 3 - Publication references (without fulltext) | |
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