Title: | Influence of diluted acid mixtures on selective etching of MHz- A nd kHz-fs-laser inscribed structures in YAG | Authors: | Hasse, Kore Yunxin Kip, Detlef Kränkel, Christian |
Language: | eng | Issue Date: | 2021 | Publisher: | OSA | Document Type: | Article | Journal / Series / Working Paper (HSU): | Optical materials express | Volume: | 11 | Issue: | 5 | Page Start: | 1546 | Page End: | 1554 | Publisher Place: | Washington, DC | Abstract: | We show that the inscription velocity of fs-laser written structures in YAG crystals can be significantly improved by the use of MHz repetition rates for the writing process. Using a 10 MHz inscription laser, record high writing velocities up to 100 mm/s are achieved. Also, the selective etching process is accelerated using a diluted mixture of 22% H3PO4and 24% H2SO4. The diluted mixture enables selective etching of up to 9.6 mm long, 1 μm wide and 18 μm high microchannels in 23 days. The etching parameter D of 11.2 μm2/s is a factor of 3 higher than previously reported and the selectivity is even increased by an order of magnitude. c 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. |
Organization Units (connected with the publication): | Experimentalphysik und Materialwissenschaften | ISSN: | 2159-3930 2159-3930 |
Publisher DOI: | 10.1364/OME.423931 |
Appears in Collections: | 3 - Publication references (without fulltext) |
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