KLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications
Publication date
2019-07
Document type
Research article
Author
Medina, Marc
Pujol, Maria Cinta
Masons, Jaume
Ródenas, Airán
Aguiló, Magdalena
Díaz, Francisco
Rüter, Christian E.
Organisational unit
DOI
10.3390/mi10070454
Scopus ID
2-s2.0-85069514332
Pubmed ID
31284508
ISSN
2072-666X
2072-666X
Series or journal
Micromachines
Periodical volume
10
Periodical issue
454
Peer-reviewed
✅
Part of the university bibliography
✅
Abstract
This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.
Cite as
Enthalten in: Micromachines. - Basel : MDPI, 2010. - Online-Ressource. - Bd. 10.2019, 454 (Juli), insges. 9 S.
Version
Not applicable (or unknown)
Access Right
Metadata only access