Title: KLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications
Authors: Medina, Marc
Pujol, Maria Cinta
Kip, Detlef 
Masons, Jaume
Ródenas, Airán
Aguiló, Magdalena
Díaz, Francisco
Rüter, Christian E.
Language: eng
Issue Date: Jul-2019
Publisher: MDPI
Document Type: Article
Source: Enthalten in: Micromachines. - Basel : MDPI, 2010. - Online-Ressource. - Bd. 10.2019, 454 (Juli), insges. 9 S.
Journal / Series / Working Paper (HSU): Micromachines
Volume: 10
Issue: 454
Publisher Place: Basel
This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.
Organization Units (connected with the publication): Experimentalphysik und Materialwissenschaften 
ISSN: 2072-666X
Publisher DOI: 10.3390/mi10070454
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