Title: | KLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications | Authors: | Medina, Marc Pujol, Maria Cinta Kip, Detlef Masons, Jaume Ródenas, Airán Aguiló, Magdalena Díaz, Francisco Rüter, Christian E. |
Language: | eng | Issue Date: | Jul-2019 | Publisher: | MDPI | Document Type: | Article | Source: | Enthalten in: Micromachines. - Basel : MDPI, 2010. - Online-Ressource. - Bd. 10.2019, 454 (Juli), insges. 9 S. | Journal / Series / Working Paper (HSU): | Micromachines | Volume: | 10 | Issue: | 454 | Publisher Place: | Basel | Abstract: | This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing. |
Organization Units (connected with the publication): | Experimentalphysik und Materialwissenschaften | ISSN: | 2072-666X | Publisher DOI: | 10.3390/mi10070454 |
Appears in Collections: | 3 - Reported Publications |
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