KLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications
Publication date
2019-07
Document type
Research article
Author
Medina, Marc
Pujol, Maria Cinta
Masons, Jaume
Ródenas, Airán
Aguiló, Magdalena
Díaz, Francisco
Rüter, Christian E.
Organisational unit
Scopus ID
Pubmed ID
Series or journal
Micromachines
Periodical volume
10
Periodical issue
454
Peer-reviewed
✅
Part of the university bibliography
✅
Abstract
This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.
Cite as
Enthalten in: Micromachines. - Basel : MDPI, 2010. - Online-Ressource. - Bd. 10.2019, 454 (Juli), insges. 9 S.
Version
Not applicable (or unknown)
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