Femtosecond laser written and selectively etched structures for micro-optofluidics in a monolithic lithium niobate chip
Publication date
2024
Document type
Konferenzbeitrag
Organisational unit
Conference
Conference on Lasers and Electro-Optics 2024 (CLEO 2024) ; Charlotte, North Carolina ; May 5–10, 2024
Publisher
Optica Publishing Group
Book title
Proceedings: CLEO 2024 [CLEO: Applications and Technology]
Article ID
paper JTu2A.70
Peer-reviewed
✅
Part of the university bibliography
✅
Language
English
Abstract
Femtosecond laser written and selectively etched 3D-micro-optofluidic devices have been fabricated with high selectivity (~2900) and low roughness (~23 nm), combining a waveguide with a microchannel in the volume of a monolithic lithium niobate chip.
Version
Published version
Access right on openHSU
Metadata only access