Femtosecond laser written and selectively etched structures for micro-optofluidics in a monolithic lithium niobate chip

Publication date
2024
Document type
Konferenzbeitrag
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ISBN
Conference
CLEO: Applications and Technology 2024, CLEO 2024 ; Charlotte, North Carolina ; May 5–10, 2024
Book title
CLEO 2024 : Proceedings
Part of the university bibliography
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Abstract
Femtosecond laser written and selectively etched 3D-micro-optofluidic devices have been fabricated with high selectivity (~2900) and low roughness (~23 nm), combining a waveguide with a microchannel in the volume of a monolithic lithium niobate chip.
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Published version
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