DC FieldValueLanguage
dc.contributor.authorMedina, Marc-
dc.contributor.authorPujol, Maria Cinta-
dc.contributor.authorKip, Detlef-
dc.contributor.authorMasons, Jaume-
dc.contributor.authorRódenas, Airán-
dc.contributor.authorAguiló, Magdalena-
dc.contributor.authorDíaz, Francisco-
dc.contributor.authorRüter, Christian E.-
dc.date.accessioned2021-12-27T08:17:19Z-
dc.date.available2021-12-27T08:17:19Z-
dc.date.issued2019-07-
dc.identifier.citationEnthalten in: Micromachines. - Basel : MDPI, 2010. - Online-Ressource. - Bd. 10.2019, 454 (Juli), insges. 9 S.-
dc.identifier.issn2072-666X-
dc.identifier.issn2072-666X-
dc.description.abstractThis paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.-
dc.description.sponsorshipExperimentalphysik und Materialwissenschaften-
dc.language.isoeng-
dc.publisherMDPI-
dc.relation.ispartofMicromachines-
dc.titleKLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications-
dc.typeArticle-
dc.identifier.doi10.3390/mi10070454-
dc.identifier.pmid31284508-
dc.identifier.scopus2-s2.0-85069514332-
dcterms.bibliographicCitation.volume10-
dcterms.bibliographicCitation.issue454-
dcterms.bibliographicCitation.originalpublisherplaceBasel-
local.submission.typeonly-metadata-
dc.type.articleScientific Article-
hsu.opac.importopac-2019-
hsu.identifier.ppn1670313301-
hsu.peerReviewed-
item.grantfulltextnone-
item.languageiso639-1en-
item.fulltext_sNo Fulltext-
item.openairetypeArticle-
item.fulltextNo Fulltext-
crisitem.author.deptExperimentalphysik und Materialwissenschaften-
crisitem.author.orcid0000-0001-7923-0113-
crisitem.author.parentorgFakultät für Elektrotechnik-
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