DC Field | Value | Language |
---|---|---|
dc.contributor.author | Medina, Marc | - |
dc.contributor.author | Pujol, Maria Cinta | - |
dc.contributor.author | Kip, Detlef | - |
dc.contributor.author | Masons, Jaume | - |
dc.contributor.author | Ródenas, Airán | - |
dc.contributor.author | Aguiló, Magdalena | - |
dc.contributor.author | Díaz, Francisco | - |
dc.contributor.author | Rüter, Christian E. | - |
dc.date.accessioned | 2021-12-27T08:17:19Z | - |
dc.date.available | 2021-12-27T08:17:19Z | - |
dc.date.issued | 2019-07 | - |
dc.identifier.citation | Enthalten in: Micromachines. - Basel : MDPI, 2010. - Online-Ressource. - Bd. 10.2019, 454 (Juli), insges. 9 S. | - |
dc.identifier.issn | 2072-666X | - |
dc.identifier.issn | 2072-666X | - |
dc.description.abstract | This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing. | - |
dc.description.sponsorship | Experimentalphysik und Materialwissenschaften | - |
dc.language.iso | eng | - |
dc.publisher | MDPI | - |
dc.relation.ispartof | Micromachines | - |
dc.title | KLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications | - |
dc.type | Article | - |
dc.identifier.doi | 10.3390/mi10070454 | - |
dc.identifier.pmid | 31284508 | - |
dc.identifier.scopus | 2-s2.0-85069514332 | - |
dcterms.bibliographicCitation.volume | 10 | - |
dcterms.bibliographicCitation.issue | 454 | - |
dcterms.bibliographicCitation.originalpublisherplace | Basel | - |
local.submission.type | only-metadata | - |
dc.type.article | Scientific Article | - |
hsu.opac.import | opac-2019 | - |
hsu.identifier.ppn | 1670313301 | - |
hsu.peerReviewed | ✅ | - |
item.languageiso639-1 | en | - |
item.fulltext_s | No Fulltext | - |
item.openairetype | Article | - |
item.grantfulltext | none | - |
item.fulltext | No Fulltext | - |
crisitem.author.dept | Experimentalphysik und Materialwissenschaften | - |
crisitem.author.orcid | 0000-0001-7923-0113 | - |
crisitem.author.parentorg | Fakultät für Elektrotechnik | - |
Appears in Collections: | 3 - Publication references (without fulltext) |
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