Reduction of surface roughness in selectively etched microchannels in lithium niobate
Publication date
2024-11-27
Document type
Forschungsartikel
Author
Organisational unit
Publisher
Optica Publishing Group
Series or journal
Optical Materials Express
ISSN
Periodical volume
14
Periodical issue
12
First page
2995
Last page
3005
Peer-reviewed
✅
Part of the university bibliography
✅
Language
English
Abstract
By post-etching annealing, the roughness of microchannels fabricated by fs laser assisted selective etching could be reduced to values of 2 nm. The influence of inscription parameters and annealing conditions on the microchannels’ roughness and the evolution of their shape with annealing temperature and time have been investigated. A functional dependence enabling the estimation of roughness values resulting from certain processing parameters was determined. The low surface roughness achieved enables the transport of fluids with very low friction factors and optical-grade surfaces for the combination of microfluidic channels with optical waveguides, allowing the acousto-optical, electro-optical, and (nonlinear) optical properties of lithium niobate to be utilized for future monolithic optofluidic devices.
Description
This is an open access article under of the Optica Open Access Publishing Agreement (https://doi.org/10.1364/OA_License_v2#VOR-OA).
Version
Published version
Access right on openHSU
Metadata only access