Femtosecond-laser assisted selective etching of microchannels in lithium niobate
Publication date
2023-09-04
Document type
Konferenzbeitrag
Author
Organisational unit
Conference
2023 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC) ; Munich, Germany ; June 26–30, 2023
Publisher
IEEE
Book title
2023 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference (CLEO/Europe-EQEC) : Proceedings
Part of the university bibliography
✅
Language
English
Keyword
Selective etching
Diffusion coefficient
Laser beam
Digital microscope
Inscription
Electro-optical
Pulse energy
High refractive index
Side-channel
Material solution
Piezoelectric properties
Need for Structure
Ultrashort laser pulses
Nonlinear absorption
Version
Published version
Access right on openHSU
Metadata only access