Optically smooth microchannels in the volume of lithium niobate fabricated by selective etching of fs-laser written structures and subsequent annealing
Publication date
2024-10-31
Document type
Konferenzbeitrag
Organisational unit
Conference
12th European Optical Society Annual Meeting (EOSAM 2024) ; Naples, Italy ; September 9–13, 2024
Publisher
EDP Sciences
Series or journal
EPJ Web of Conferences
ISSN
Periodical volume
309
Article ID
06013
Peer-reviewed
✅
Part of the university bibliography
✅
Language
English
Abstract
3D-hollow microstructures with few tens of micrometer in diameter with an optical-quality surface roughness (R_a ≤ 1 nm) have been fabricated in the volume of lithium niobate by selective etching of fs-laser written structures and post-etching annealing. The fs-laser writing parameters and the annealing process have been refined to reduce the average surface roughness and the shape change. Systematically investigating the annealing process, an empirical functional description of the temporal evolution of the surface roughness was found completing the data set of processing parameters for selective etching of fs-laser written structures, allowing to control the fabrication process of the hollow microstructures concerning both shape and surface roughness. Thus, our results represent another milestone within the research towards monolithic micro-(opto)fluidic applications inside the multifunctional crystal lithium niobate.
Description
This is an open access article under the terms of the Creative Commons Attribution License (https://creativecommons.org/licenses/by/4.0/).
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Published version
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