Publication:
KLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications

cris.customurl13977
cris.virtual.departmentExperimentalphysik und Materialwissenschaften
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cris.virtual.departmentbrowseExperimentalphysik und Materialwissenschaften
cris.virtual.departmentbrowseExperimentalphysik und Materialwissenschaften
cris.virtual.departmentbrowseExperimentalphysik und Materialwissenschaften
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cris.virtualsource.departmente25ab10e-f014-405b-ae9d-5dfa5939c704
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dc.contributor.authorMedina, Marc
dc.contributor.authorPujol, Maria Cinta
dc.contributor.authorKip, Detlef
dc.contributor.authorMasons, Jaume
dc.contributor.authorRódenas, Airán
dc.contributor.authorAguiló, Magdalena
dc.contributor.authorDíaz, Francisco
dc.contributor.authorRüter, Christian E.
dc.date.issued2019-07
dc.description.abstractThis paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing.
dc.description.versionNA
dc.identifier.citationEnthalten in: Micromachines. - Basel : MDPI, 2010. - Online-Ressource. - Bd. 10.2019, 454 (Juli), insges. 9 S.
dc.identifier.doi10.3390/mi10070454
dc.identifier.issn2072-666X
dc.identifier.issn2072-666X
dc.identifier.pmid31284508
dc.identifier.scopus2-s2.0-85069514332
dc.identifier.urihttps://openhsu.ub.hsu-hh.de/handle/10.24405/13977
dc.language.isoen
dc.publisherMDPI
dc.relation.journalMicromachines
dc.relation.orgunitExperimentalphysik und Materialwissenschaften
dc.rights.accessRightsmetadata only access
dc.titleKLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications
dc.typeResearch article
dcterms.bibliographicCitation.originalpublisherplaceBasel
dspace.entity.typePublication
hsu.peerReviewed
hsu.uniBibliography
oaire.citation.issue454
oaire.citation.volume10
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