Publication: KLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications
cris.customurl | 13977 | |
cris.virtual.department | Experimentalphysik und Materialwissenschaften | |
cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtual.departmentbrowse | Experimentalphysik und Materialwissenschaften | |
cris.virtual.departmentbrowse | Experimentalphysik und Materialwissenschaften | |
cris.virtual.departmentbrowse | Experimentalphysik und Materialwissenschaften | |
cris.virtualsource.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtualsource.department | e25ab10e-f014-405b-ae9d-5dfa5939c704 | |
cris.virtualsource.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtualsource.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtualsource.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtualsource.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtualsource.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
cris.virtualsource.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
dc.contributor.author | Medina, Marc | |
dc.contributor.author | Pujol, Maria Cinta | |
dc.contributor.author | Kip, Detlef | |
dc.contributor.author | Masons, Jaume | |
dc.contributor.author | Ródenas, Airán | |
dc.contributor.author | Aguiló, Magdalena | |
dc.contributor.author | Díaz, Francisco | |
dc.contributor.author | Rüter, Christian E. | |
dc.date.issued | 2019-07 | |
dc.description.abstract | This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 m wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing. | |
dc.description.version | NA | |
dc.identifier.citation | Enthalten in: Micromachines. - Basel : MDPI, 2010. - Online-Ressource. - Bd. 10.2019, 454 (Juli), insges. 9 S. | |
dc.identifier.doi | 10.3390/mi10070454 | |
dc.identifier.issn | 2072-666X | |
dc.identifier.issn | 2072-666X | |
dc.identifier.pmid | 31284508 | |
dc.identifier.scopus | 2-s2.0-85069514332 | |
dc.identifier.uri | https://openhsu.ub.hsu-hh.de/handle/10.24405/13977 | |
dc.language.iso | en | |
dc.publisher | MDPI | |
dc.relation.journal | Micromachines | |
dc.relation.orgunit | Experimentalphysik und Materialwissenschaften | |
dc.rights.accessRights | metadata only access | |
dc.title | KLu(WO₄)₂/SiO₂ Tapered Waveguide Platform for Sensing Applications | |
dc.type | Research article | |
dcterms.bibliographicCitation.originalpublisherplace | Basel | |
dspace.entity.type | Publication | |
hsu.peerReviewed | ✅ | |
hsu.uniBibliography | ✅ | |
oaire.citation.issue | 454 | |
oaire.citation.volume | 10 |