Concept for a Miniaturized Machine-Tool-Module for the Manufacturing of Micro -Components Operated at its Resonance Frequency
Publication date
2013
Document type
Conference paper
Author
Oberländer, Carsten
Organisational unit
Conference
13th International Conference of the European Society for Precision Engineering and Nanotechnology
Volume (part of multivolume book)
Vol. 1
First page
167
Last page
170
Part of the university bibliography
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Description
Proceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology : May 27th - 31st, 2013, Berlin, Germany
Cite as
Enthalten in: Proceedings of the 13th International Conference of the European Society for Precision Engineering and Nanotechnology ; Vol. 1: / European Society for Precision Engineering and Nanotechnology. - Bedford : Euspen, 2013 . - 2013, Seite 167-170
Version
Not applicable (or unknown)
Access right on openHSU
Metadata only access