Analysis of the Vistec LMS IPRO3 performance and accuracy enhancement techniques

Antesberger, Gunter; Knoth, Sven; Laske, Frank; Rudolf, Jens; Cotte, Eric; Alles, Benjamin; Bläsing, Carola; Fricke, Wolfgang; Rinn, Klaus

doi:10.1117/12.686089

Analysis of the Vistec LMS IPRO3 performance and accuracy enhancement techniques

Publication date

2006-10-20

Document type

Konferenzband oder Tagungsband

Author

Antesberger, Gunter

Knoth, Sven

Laske, Frank

Rudolf, Jens

Cotte, Eric

Alles, Benjamin

Bläsing, Carola

Fricke, Wolfgang

Rinn, Klaus

Organisational unit

Advanced Mask Technology Center (AMTC), Dresden

DOI

10.1117/12.686089

URI

https://openhsu.ub.hsu-hh.de/handle/10.24405/21913

Scopus ID

2-s2.0-33846621552

Conference

SPIE Photomask Technology ; Monterey, CA, United States ; September 19–22, 2006

Publisher

SPIE

Series or journal

SPIE Proceedings

ISSN

0277-786X

Periodical volume

6349

ISBN

0-8194-6444-9

Part of the university bibliography

Nein

Language

English

Keyword

Accuracy enhancement

ANOVA

Coordinate measurement

Grid calibration

Matching

Photo lithographic masks

Random factor models

Registration metrology

Reproducibility

Version

Published version

Access right on openHSU

Metadata only access